SPTS Technologies is a leading manufacturer of plasma etch and deposition and thermal processing equipment for the semiconductor industry.
Formed in 2009, following the merger of Surface Technology Systems and Aviza Technology, followed by the acquisition of Primaxx Inc and DRIE assets of Tegal, the company has a worldwide installed base, and over 25 years experience in advanced process technologies such as:
Inductively Coupled Plasma (ICP) etching of silicon, dielectrics, polymers and metals
Deep Reactive Ion etching (DRIE) of silicon
Dry release etch using HF or XeF2
Plasma Enhanced Chemical Vapour Deposition (PECVD)
Physical Vapour Deposition (PVD)
Metal-Organic Chemical Vapour Deposition (MOCVD)
Atmospheric Pressure Chemical Vapour Deposition (APCVD)
Diffusion and LPCVD Furnaces
SPTS supplies processing equipment to the world's leading semiconductor device manufacturers and research institutions, and offers dedicated local sales and customer support through a network of international offices and agents.