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C – Transfer valves and doors fSEMI

偉拓科技股份有限公司


聯絡人:周小姐
電話:(03)5169088
傳真:(03)5169099
地址:新竹市東區千甲里水利路81號8樓之6
網址:http://www.vatvalve.com



產品資訊

  • 分類:
    其他電子元件、電子材料

產品說明

C – Transfer valves and doors fSEMI

are used floadlock and process chamber isolation. The valves, as a space–saving option only the inserts, are installed between chambers integrated. Doors are used fisolation on the atmospheric pressure side. The sizes are in accordance with the SEMI standards, but customer specifed dimensions are possible.

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